Towards Synthesis of Micro-/Nano-systems

At the beginning of the 21st century, manufacturing industry is faced with new challenges stemming from globalization and the need for environmental sustainability. The progress of micro-/nano technology means that precision engineering is now considered to be one of the core disciplines necessary for coping with the sometimes severe requirements of new product and system development. From basic research to practical applications, advanced process-technological methods for the design and synthesis of micro-/nano-systems are becoming more and more important. This collection of papers, presented at 11th International Conference on Precision Engineering, includes high-quality papers for industrial and scientific sources, discusses leading-edge technologies and forecasts future trends. Topics covered include but are not limited to:

Keynote Papers: Merging Technologies for Optics.- Fast Tool Servos: Advances in Precision, Acceleration, and Bandwidth.- Microsystem Technologies for Automotive Applications.- Full Papers [A1 Design]: System Concept and Innovative Component Design for Ultra-Precision Assembly Processes.- Development of a Design Tool for Machine Tools Combining Conceptual Design Support and Detail Design Method.- Precision Contouring Control of Multi-Axis Feed Drive Systems.- Areal Gear Flank Description as a Requirement for Optical Gear Metrology.- [A2 System]: Detecting Perturbation Occurrence during Walking.- Supporting the Reuse of Parts Based on Operation Histories of Products and Preference of Consumers.- Multi-objective Reactive Scheduling Based on Genetic Algorithm.- [A3 Measurement].- Ultraprecision Wide-angle Profile Measurement with Air-bearing Cylinder Slant Probes.- Development of a Laser-Guided Deep-Hole Measuring System: Autocollimation System.- Development of an Optical Measuring Device for Rotation Accuracy of Micro-Spindle: Application to Measurements of a High-Speed Spindle.- Measurement of Involute Profile by Rolling of Artifact.- [A4 Actuator]: Study on Manufacturing Method to Reduce Cogging Torque of Motor with Separate Core.- A High Power and Precision Ultrasonic Linear Motor with Lateral Flexible Supports.- A Precise Motion Measurement of a Miniature Robot Driven by the Deformation of Piezoelectric Actuators.- Development of IVUS (Intra-Vascular Ultra-Sound) Driven by Ultrasonic Micro Motor -Principle of Drive and Detection Methods.- [A5 Precise mechanism]: Development of Membrane Driven Micropump -Principle of Microbubble Driving Mechanism and Prototype.- A 3-DOF Rotational Precision Positioning Stage using Spring-mounted PZT Actuators.- Active Damping of a Wafer Loading Robot using Piezoceramic Actuators.- [A6 Control/Sensing]: Visual Feedback Control of a Micro Lathe.- An 8-Axis Robot Based Rough Cutting System for Surface Sculpturing.- A New Position Surveying System for the Underground Pipes Using Two Rotary Encoders.- [A7 Machine tools]: Measurement of Cutting Torque by Speed Increasing Spindle.- Diamond Turning using Water Drive Spindle.- Development and Evaluation of a High-Precision Machining Center with Friction-Less Drives.- Machining Feature-Driven 5-Axis CNC Machine Tools.- [B1 Micro structure]: Selective Anodising Technologies for Obtaining Translucent Micro Structures.- Development of Rectangular Microblasting Nozzle.- Thick SU-8 Mask for Micro Channeling of Glass by using Micro Abrasive Jet Machining.- Fabrication of Self-assembled Microstructure using Controlled Liquid Spreading on Textured Surface.- [B2 Micro/Nano manipulation]: Improving Performance of Direct Photosynthetic/Metabolic Micro Bio Fuel Cell (DPBFC) by Gene Manipulation of Bacteria.- Nanometer Deflection Control of AFM Probe by Irradiating Polarized Laser and its Application to Nano-Structuring Process.- Investigation on Fabricating 3D Structures Using Inkjet Printing Technology.- Miniaturization of Dot Pattern by Metal Forming for Direct Marking of 2D Barcode Symbols.- [B3 Plasma process]: Plasma Etching Based Processes for the Fabrication of Micro Structured Linear Guide.- Ultraprecision Finishing of Photomask Substrate by Utilizing Atmospheric Pressure Plasma..- Development of Ultra Precision Finishing Method for Quartz Crystal Wafer Utilizing Atmospheric Pressure Plasma.- Sub-nanometer Smoothing of Diamond-turned Metal Surfaces using Ion Beams.- [B4 Laser process]: Laser Machining of Cobalt Cemented Tungsten Carbides.- Study of Thermal Deformation of a Base Sheet Caused by Laser Cutting.- Laser Welding of Transparent Resin Plates.- Fabrication of Carbon Nanotube Reinforced Hydroxyapatite Coating on Stainless Steel 316L by Laser Surface Treatment.- [B5 Polishing/Finishing]: Novel Abrasive-free Planarization of Si and SiC using Catalyst.- Polishing of Single Crystal SiC with the LHA Pad.- A Computational Study on Slurry Flow between a Wafer and CMP Pad with Grooves.- [B6 Integrated process]: Multilevel Computer Generated Hologram on a Curved Surface for High Power CO2 Laser Beam Shaping.- Milling-Combined Laser Metal Sintering System and Production of Injection Molds with Sophisticated Functions.- Development of Optical Elements with ELID-grinding and MRF Synergistic Finishing Process.- Fabrication of Ultraprecisely Figured Mirror for Nano Focusing Hard-x-ray.- [B7 Grinding]: Surfaces Formation of Precision ELID Grinding Rock Minerals.- Dressing of Coarse-Grained Diamond Wheels for Ductile Machining of Brittle Materials.- Study on Subsurface Damage Generated in Ground Si Wafer.- Fabrication of High-quality Surfaces on Precise Lens Mold Materials by a new ELID Grinding Wheel.- Short Papers [Design]: A GA-based Optimization of Compliant Micro-manipulator.- Path Control Scheme for Vision Guided Micro Manipulation System.- Machined Surface Analysis for 5-axis Machine Tools.- [System]: A New Approach Manufacturing Cell Scheduling based on Skill-based Manufacturing Integrated to Genetic Algorithm.- Slide-bending Formation of Thin Metal Sheet by Using an Industrial Robot.- [Machine]: High Accuracy and High Capacity Motor Cooling System Using Phase Change of Refrigerant for Semiconductor Lithography Apparatus.- Development of the Earthworm Robot using a Shape Memory Alloy.- Improvement of Propulsion Mechanism based on the Inertial Force.- [Measurement]: A High-order Spline Filter for Surface Roughness Measurement.- Surface Structure of Monocrystalline Silicon that has been Anisotropically Corroded with the Help of Microwaves.- [Novel Process]: Development of an Ultra-Thin 100 Micron Diametrical Coaxial Cable using a Coating Technique.- Study on Si Wafer Cooling by Low Pressure Argon Gas in Vacuum Eenvironment.- [Process]: Research on Development of Advanced Analyzer Components with Ultraprecision.- Effects of Wear of Single Crystal Diamond Tool with Large Nose Radius on Work Hardening and Residual Stress.- Experimental Analysis And Optimization of Cutting Parameters for End Milling Aluminium Alloy.- Study on the ELID Grinding Forces of Ceramics and Steels.- Grinding of C/C-SiC composite in dry method.- Micromachining Characteristics of Sapphire Surface with Fifth Harmonic Nd:YAG Lasers.- Development of an Automatic Scraping Machine with Recognition for Bearing of Scraped Surfaces: Construction of Automatic Scraping Machine.