The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Part I. Materials and Processes for MEMS; Part II. Microdevices and Micro/Nanofluidics; Part III. Poster Session; Part IV. Micro/Nanomechanics; Part V. MEMS Reliability and Tribology; Author index; Subject index.